Aether

In Greek mythology, Aether (Greek: Αιθηρ, Aither, "ether"), also known as Acmon (Greek: Ακμων, Akmon, "zenith" or "untiring") was the primordial god of the upper atmosphere, the upper air that the gods breathe. Hesiod gives him as the son of Erebus and Nyx, while Hyginus and Ovid give him as the son of Chaos and Caligo (Darkness). Further, Orphic hymns state that he is the son of Chronos and Ananke. The most accepted parentage of Aether is that of Erebus and Nyx.

With his sister and wife, Hemera, Aether fathered Thalassa. With Gaea, Aether sired Dolos, Lyssa, Penthus, Poine, and Aergia.

Hyginus
Hyginus goes on to write that Aether consorted with both Hemera and Gaea and produced several children with each goddess. With Hemera, he fathered Gaea, Uranus, and "Sea". With Gaea, he fathered "Grief, Deceit, Wrath, Lamentation, Falsehood, Oath, Vengeance, Intemperance, Altercation, Forgetfulness, Sloth, Fear, Pride, Incest, Combat, Ocean, Themis, Tartarus, Pontus; and the Titans, Briareus, Gyges, Steropes, Atlas, Hyperion, and Polus, Saturn, Ops, Moneta, Dione; and three Furies - namely, Alecto, Megaera, Tisiphone."

Orphic Hymns
Aristophanes states that Aether was the son of Erebus. However, Damascius states that Aether, Erebus, and Chaos are siblings and are the children of Chronos.

Epiphanius suggests that Chronos and Ananke, in their serpentine forms, coiled around the primal world egg until it was split into two halves. The atoms of the world then sorted themselves out; the finer atoms floated above and became Aether while the heavier ones sank and became Gaea and Pontus.